Simulation of Rectangular Slot MEMS Switch and Comparing its Return Loss Performance with Basic Rectangular Switch at DC-30GHz
DOI:
https://doi.org/10.47750/pnr.2022.13.S04.026Keywords:
Novel Rectangular Slot MEMSShunt Switch, Basic Rectangular Switch, Frequency, Return Loss Performance, HFSS, Microelectronics.Abstract
Aim: Return loss performance of Rectangular slot MEMS switch and basic rectangular switch is analyzed and simulated at upto 30 GHz using HFSS software is described in this paper.
Materials and Methods: The return loss performance of rectangular slot MEMS switch (n=25) is compared to that of the basic rectangular switch over a frequency of upto 30GHz. Calculation of 25 samples using sample computation with Alpha of 0.05, Beta of 0.2 and pretest power of 80 % was done.
Results: Return loss performance of rectangular slot switch is better than basic rectangular switch. Optimized dimensions for improved return loss performance are Lb=160 micrometers, Wb=20 micrometers and Tb=1 micrometer. The attained significance of return loss performance is p<0.05.
Conclusion: Results show that novel rectangular slot MEMS shunt switch has better return loss performance compared to basic rectangular switch.
